SG Products - Advanced uLK dielectrics and ultra-conformal dielectrics for next generation IC’s FEOL and BEOL requirements

SG Products have been in high volume service for more than a decade.

The SG series methylsiloxane dielectrics provide an unparalleled quality and consistency. SG-Series products are high quality, robust, and crack-free spin-on dielectrics designed to meet planarizing requirements for partial (for IMD) and total etch back (for PMD) processes planarization processes found in both BEOL and FEOL applications. SG-Series has superior gap fill performance and compatible for devices with narrow (down to 0.1µm) high AR (up to 7:1) patterned features. PiBond’s Silecs® SG series are currently produced in the three sub-series: SG 200, SG 300 and SG 400.

We also offer advanced uLK dielectrics and ultra-conformal dielectrics for next generation IC’s FEOL and BEOL requirements.

Product 
Parameter
Dielectric constant Refractive index @ 633nm Crack threshold, single coat (nm)
SG 200 4.05 1.412 ~600
SG 300 3.8 1.399 >600
SG 400 3.5 1.388 >1600

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